“The 6500 Advanced Etch system was selected on the basis of the unique capabilities of our innovative HRe- (High-density Reflected electron) source,” said Thomas Mika, President & CEO of Tegal Corporation. “A key focus area for our company is the compound semiconductor space, which is seeing renewed growth due to the ubiquitous usage of wireless electronics.”
“The HRe- chamber enables us to etch films on GaAs substrates at a low temperature with suitable etch rate, etch profile and selectivity to mask and under-layer,” said Dr. Nercy Ebrahimi, Director of Process Technology at Skyworks. “These etch characteristics are important for us to manufacture our advanced wireless devices that enable mobile connectivity through semiconductor innovation.”
The 6500 etch system is a state-of the-art, high-vacuum etch cluster tool and is used in production fabs to etch multiple thin films in an extremely clean process environment. These films are widely used in compound semiconductor & opto-electronics, non-volatile memory, analog & power devices and MEMS devices. The 6500 system has an easy-to-use GUI, SECS/GEM communication and flexible wafer shape and size handling capability that makes it ideal for production environments. Optional integrated plasma strip and rinse chambers, electro-static chucks with a wide temperature range, plasma emission diode array end-point detection and active wafer temperature monitoring and control are available to etch many different dielectric and conductive films used in semiconductor and other electronic device production.
Safe Harbor Statement
Except for historical information, matters discussed in this news release contain forward-looking statements within the meaning of Section 27A of the Securities Act and Section 21E of the Exchange Act. Forward-looking statements, which are based on assumptions and describe our future plans, strategies and expectations, are generally identifiable by the use of the words "anticipate," "believe," "estimate," "expect," "intend," "project" or similar expressions. These forward-looking statements are subject to risks, uncertainties and assumptions about the Company including, but not limited to industry conditions, economic conditions, acceptance of new technologies and market acceptance of the Company's products and services. All forward-looking statements attributable to us or persons acting on our behalf are expressly qualified in their entirety by the cautionary statements in this paragraph. For a further discussion of these risks and uncertainties, please refer to the Company's periodic filings with the Securities and Exchange Commission.
About Tegal
Tegal provides process and equipment solutions to leading edge suppliers of advanced semiconductor and nanotechnology devices. Incorporating unique, patented etch and deposition technologies, Tegal’s system solutions are backed by over 35 years of advanced development and over 100 patents. Some examples of devices enabled by Tegal technology are energy efficient memories found in portable computers, cellphones, PDAs and RFID applications; megapixel imaging chips used in digital and cellphone cameras; power amplifiers for portable handsets and wireless networking gear; and MEMS devices like accelerometers for automotive airbags, microfluidic control devices for ink jet printers; and laboratory-on-a-chip medical test kits.
For more information about Tegal Corporation, visit: www.tegal.com.
About Skyworks Solutions
Skyworks Solutions, Inc. is an innovator of high performance analog and mixed signal semiconductors enabling mobile connectivity. The company's power amplifiers, front-end modules and direct conversion radios are at the heart of many of today's leading-edge multimedia handsets. Leveraging core technologies, Skyworks also offers a diverse portfolio of linear products that support automotive, broadband, cellular infrastructure, industrial and medical applications. Headquartered in Woburn, Mass., Skyworks is worldwide with engineering, manufacturing, sales and service facilities throughout Asia, Europe and North America.
For more information about Skyworks Solutions, visit: www.skyworksinc.com.
