“Customers continue to be very excited about the productivity and technological advantages delivered by the Optima HD,” said Mary Puma, chairman and CEO of Axcelis. “The Optima HD offers unmatched flexibility in performing implants for both traditional and future device manufacturing trends – including molecular implants for dual poly gate and advanced source drain extension applications as well as hydrogen for SOI applications. We’re pleased to build on our relationship with this customer, as they realize the benefits of the Optima platform. Designed for simplicity and cost effectiveness, the Optima platform of implanters provides complete, extendible applications coverage, giving users maximum flexibility and capital efficiency.”
The Optima HD covers all traditional high dose implants while providing significant mid dose applications overlap. The Optima HD delivers precise implants using Axcelis’ advanced spot beam technology, resulting in exceptional implant uniformity and repeatability. Axcelis’ proprietary RadiusScanTM endstation further enhances productivity and enables the system to cover an extremely broad dose range.
About Axcelis Technologies, Inc.
Axcelis Technologies, Inc., headquartered in Beverly, Massachusetts, provides innovative, high-productivity solutions for the semiconductor industry. Axcelis is dedicated to developing enabling process applications through the design, manufacture and complete life cycle support of ion implantation, rapid thermal processing, and cleaning and curing systems. Axcelis Technologies has key product development centers in Beverly, Massachusetts, as well as in Saijo, Japan through its joint venture, SEN Corporation, an SHI and Axcelis Company. The company's Internet address is: www.axcelis.com.
Forward Looking Statements
This press release includes certain statements, known as “forward-looking statements,” which express the current expectations of Axcelis management. Product manufacturing and delivery issues, customer order push-outs or cancellations and product performance could cause actual results to differ materially from those currently anticipated as expressed in this press release. These risks and other risk factors relating to Axcelis are described more fully in the most recent Form 10-K filed by Axcelis and in other filings from time to time with the Securities and Exchange Commission.
